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Waferhandling Plasma
To enhance the efficiency of solar cells, they are coated with an anti-reflective film. The film is applied using a special technique called plasma enhanced chemical vapor deposition (PECVD). Inherently a batch process, a graphite boat is loaded with wafers and fed into an oven. The baumann Waferhandling Plasma fully automates this loading process, and employs a specially developed gripper technology which ensures high handling reliability while minimizing wafer damage or breakage. The system incorporates a 6-axis robot, allowing complex loading procedures with maximum precision. An integrated vision system is used to inspect for defects and coating quality after the deposition process. The baumann Waferhandling Plasma is designed using many standard components, leveraging their inherent reliability, while ensuring flexibility and short delivery times. Info-Download: baumann_Waferhandling_Plasma.pdf
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