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Waferhandling Oxidation The oxidation of the silicon surface is a versatile process for the production of high efficient solar cells. Due to the high process temperature for processing the wafer have to be transferred from the transport carrier into a SiC boat which is fed into the furnace for processing. The baumann Waferhandling Oxidation automates this loading process, and employs a specially developed gripper technology which ensures high handling reliability. The system incorporates a 6-axis robot, allowing highly flexible loading sequences with maximum accuracy. The baumann Waferhandling Oxidation is designed using standard components, leveraging their inherent reliability, while ensuring flexibility and short delivery times. Info-Download: baumann_Waferhandling_Oxidation.pdf |
