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Waferhandling Diffusion To generate a voltage potential within the solar cell, phosphorus atoms are diffused into the crystal lattice of the wafer. This process is accomplished in a diffusion furnace using a phosphorus atmosphere. Due to the high process temperature, for processing the wafer have to be transferred from the transport carrier into a quartz boat, which is fed into the furnace for processing. The baumann Waferhandling Diffusion automates this loading process, and employs a specially developed gripper technology which ensures high handling reliability. The system incorporates a 6-axis robot, allowing highly flexible loading sequences with maximum accuracy. An optionally integrated resistivity measurement system tracks the process performance. The baumann Waferhandling Diffusion is designed using standard components, leveraging their inherent reliability, while ensuring flexibility and short delivery times. Info-Download: baumann_Waferhandling_Diffusion.pdf
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